DM系列真空镀膜机

首页镀膜设备光学行业专用镀膜设备, 实验室科研专用设备

DM450

DM系列真空镀膜机

DM系列镀膜机用来蒸镀光学镜片的反射膜、透射膜及各种滤光膜和镀制无线电半导体所需的各种电学膜和轻工业品的装饰性薄膜。

分类：光学行业专用镀膜设备, 实验室科研专用设备标签：真空, 镀膜

描述

描述

应用范围：

DM系列镀膜机用来蒸镀光学镜片的反射膜、透射膜及各种滤光膜和镀制无线电半导体所需的各种电学膜和轻工业品的装饰性薄膜。

技术特点：

镀膜室的钟罩用不锈钢制成，底板采用碳钢表面镀铬制成，便于清洗；配用大抽速真空系统，真空度高，抽气时间短；工件架可旋转，保证膜层均匀；结构可靠，适应性强，操作方便，并有安全互锁；备有连接口，根据需要可以附加光学测厚仪等其它附件。

主要技术性能参数:

项目		单位	DM-300B	DM-450A	DM-450C	DM-700C
镀膜室(内径×高)		mm	φ300×450	φ450×540	φ450×540	φ700×780
可镀工件直径		mm	φ180	φ320	φ320	φ610
极限压力		pa	5×10^-4	5×10^-4	5×10^-4	5×10^-4
恢复真空抽气时间(从大气抽至2×10^-3 pa		min	≤30	≤30	≤30	≤30
蒸发	电极形式	—	电阻式	电阻式	电阻式水冷电极	电阻式水冷电极
	电极对数	—	4	4	4	4
	名义功率	kW	1.5	1.5	2.5	2.5
	电压	V	6. 12. 24	6. 12. 24	5. 10. 20	5. 10. 20
	电流	A	240. 120. 60	240. 120. 60	500. 250. 125	500. 250. 125
离子轰击	最大功率	kW	0.6	0.6	0.6	0.6
离子轰击	轰击电流(直流)	mA	~180	~180	~180	~180
工件烘烤	最大功率	kW	0.5	1	1	4.5
工件烘烤	允许烘烤温度	⁰C	~200	~200	~200	~300
工件旋转		r/min	10~30(无级调速)	5~25(变频调速)	5~26(变频调速)	10~30(无级调速)
总功率		kW	5	6.5	8	15
外形(长×宽×高)		mm	1160×960× 1540	1460×1080×1790	1460×1080×1790 (可选配光测)	1760×1240×2280 (可选配光测)

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