MDP分子泵

产品特点

优异的真空性能

MDP 系列可达到 1e-5Pa( 橡胶密封 ) 的极限真空,在低真空可获得较大抽速,

  • 1e-1~1e-4Pa 的范围内达到稳定的抽速,在一般应用领域可达到与常规分子泵相同的性能。在1Pa 阶段,MDP 系列的抽速更远高于比它更大的机械泵和罗茨泵。

极强的耐冲击性和抗粉尘性能

由于转子采用特殊结构设计,使得 MDP 系列产品比使用叶片的涡轮分子泵有更优异的抗大气冲击的性能。同时便于粉尘排出。

能获得清洁真空的无油干泵系统

MDP 系列产品的最大排气压力可达 4000Pa,允许使用极限真空 500Pa 的干式罗茨泵或隔膜泵、爪泵等作为前级。

便于维护

由于结构的优化,即便异物掉入并造成转子抱死这样的严重故障,也不会将排气槽击断。通过打磨掉产生的毛刺,泵可以修复至正常工作的状态,而不会像常规分子泵那样完全报废。

节能效果好

与扩散泵、罗茨泵相比具有节能、噪音低等优势。

描述

产品特点

优异的真空性能

MDP 系列可达到 1e-5Pa( 橡胶密封 ) 的极限真空,在低真空可获得较大抽速,

  • 1e-1~1e-4Pa 的范围内达到稳定的抽速,在一般应用领域可达到与常规分子泵相同的性能。在1Pa 阶段,MDP 系列的抽速更远高于比它更大的机械泵和罗茨泵。

极强的耐冲击性和抗粉尘性能

由于转子采用特殊结构设计,使得 MDP 系列产品比使用叶片的涡轮分子泵有更优异的抗大气冲击的性能。同时便于粉尘排出。

能获得清洁真空的无油干泵系统

MDP 系列产品的最大排气压力可达 4000Pa,允许使用极限真空 500Pa 的干式罗茨泵或隔膜泵、爪泵等作为前级。

便于维护

由于结构的优化,即便异物掉入并造成转子抱死这样的严重故障,也不会将排气槽击断。通过打磨掉产生的毛刺,泵可以修复至正常工作的状态,而不会像常规分子泵那样完全报废。

节能效果好

与扩散泵、罗茨泵相比具有节能、噪音低等优势。

应用范围

节能灯、排气台,晶体生长,材料提纯及传统的分子泵应用领域。

技术参数

型号(油润滑) MDP-600 MDP-1200 MDP-1800
Characteristics (In oil)
进气口通径 DN160mm DN200mm DN250mm
Inlet flange
排气口通径 KF40mm KF40mm KF40mm
Outlet flanger
抽气速率 600L/s 1200L/s 1800L/s
Pumping speed
极限压强 Ultimate pressure
金属密封 Metal seal 5×10-6Pa 5×10-6Pa 5×10-6Pa
橡胶密封 Rubber seal 1×10-5Pa 1×10-5Pa 1×10-5Pa
压缩比 Compression ratio
N2 1×107 1×107 1×107
H2 1×103 1×103 1×103
电机转速 24000r/min 24000r/min 24000r/min
Rotation speed
启动时间 < 10min < 10min < 10min
Start-up time
安装位置 垂直 垂直 垂直
Mounting orientation Vertical Vertical Vertical
润滑方式 油润滑 油润滑 油润滑
Lubrication In oil In oil In oil
润滑油量 260ml 260ml 260ml
Lube
冷却方式 水冷 水冷 水冷
Cooling method Water Water Water
冷却水耗量 90L/h 90L/h 90L/h
Cooling water consumption
冷却水温度 < 24℃ < 24℃ < 24℃
Cooling water temperature
冷却水管外径 Φ10 Φ10 Φ10
Cooling water pipe outside diameter
允许烘烤温度 100±10℃ 100±10℃ 100±10℃
Baking temperature
重量 34Kg 38Kg 40Kg
Weight
型号(脂润滑) MDP-600D MDP-1200D MDP-1800D
Characteristics (Grease lubrication)
进气口通径 DN160mm DN200mm DN250mm
Inlet flange
排气口通径 KF40mm KF40mm KF40mm
Outlet flanger
抽气速率 600L/s 1200L/s 1800L/s
Pumping speed
极限压强 Ultimate pressure
金属密封 Metal seal 5×10-6Pa 5×10-6Pa 5×10-6Pa
橡胶密封 Rubber seal 1×10-5Pa 1×10-5Pa 1×10-5Pa
压缩比 Compression ratio
N2 1×107 1×107 1×107
H2 1×103 1×103 1×103
电机转速 24000r/min 24000r/min 24000r/min
Rotation speed
启动时间 < 10min < 10min < 10min
Start-up time
安装位置 任意 任意 任意
Mounting orientation Any Any Any
润滑方式 脂润滑 脂润滑 脂润滑
Lubrication Grease lubrication Grease lubrication Grease lubrication
冷却方式 水冷 水冷 水冷
Cooling method Water Water Water
冷却水耗量 90L/h 90L/h 90L/h
Cooling water consumption
冷却水温度 < 24℃ < 24℃ < 24℃
Cooling water temperature
冷却水管外径 Φ10 Φ10 Φ10
Cooling water pipe outside diameter
允许烘烤温度 100±10℃ 100±10℃ 100±10℃
Baking temperature
重量 33Kg 37Kg 39Kg
Weight

联系信息

北京市大兴工业开发区高米店 盛坊路仪器仪表基地

电话: 010-60250520、010-60250572

传真: 010-60250572

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