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应用范围：

本设备应用真空溅射原理，在基体上制备各种金属膜、合金膜、化合物膜、介质膜等等，所制膜层具有致密、针孔少、低温成膜、附着力强等优点。本设备适用于实验室的薄膜研究和小批量生产。

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